Axcelis ships Purion EXE SiC implanter to new power device customer in Japan

News: Suppliers

4 April 2024

Ion implantation system maker Axcelis Technologies Inc of Beverly, MA, USA has shipped a Purion EXE SiC high-energy implanter as well as a successful Purion H200 SiC medium-energy implanter evaluation closure at power device chipmakers in Japan. The systems will be used for 150mm and 200mm production of silicon carbide power devices supporting automotive, industrial, energy and other power-intensive applications.

“The successful evaluation closure of the 200mm Purion H200 SiC system enables it to join an existing 200mm Purion EXE SiC in production at a leading power device customer in Japan,” says Dr Greg Redinbo, executive VP, marketing & applications. “The shipment of an additional Purion EXE SiC to a new 150mm customer in Japan highlights growing customer requirements for even higher-energy ion implant recipes on advanced SiC power devices, which the Purion Power Series provides,” he adds.

“We look forward to supporting our growing installed base in Japan and remain focused on expanding our market share by providing customers with the most innovative implant technology and support solutions,” says president & CEO Russell Low. “The Purion Power Series is the market leader due to its highly differentiated features and process control capabilities that are enabling for power device applications,” he claims. “Axcelis is the only ion implant company that can deliver complete recipe coverage for all power device applications.”

See related items:

Axcelis ships Purion H200 SiC Power Series ion implanter to Wolfspeed

Axcelis ships full family of Purion SiC Power Series implanters to power device makers

Tags: SiC devices Power electronics ion implanters

Visit: www.axcelis.com

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• Source: https://www.semiconductor-today.com/news_items/2024/apr/axcelis-040424.shtml